- Positive photoresist.
- Viscosity: AZ GXR 601 (14 CP).
AZ GXR 601 (46 CP).
- Film Thickness range: about 0.8 μm to 1.5 μm (14 CP).
about 2 μm to 4.5 μm (46 CP).
- Shelf life: 3 to 6 months.
| | Soft bake | 90 °C, 60 sec | Soft bake | 90 °C, 90 sec | | FT | 1.00 μm | FT | 2.94 μm | | Exposure | ALS 200 I-line stepper (NA=0.45) | Exposure | ASML/250, i-line stepper COG reticle | | PEB | 110 °C, 60 sec | PEB | 110 °C, 90 sec | | Development | 23 °C, 60 sec, 300MIF 2.38% TMAH | Development | 23 °C, 60 sec, 300MIF 2.38% TMAH |
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